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"How To Improve Energy Efficiency and Reduce CO2 Emissions With Next-generation N2 Purge Systems"

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All semiconductor manufacturers are facing mounting pressures to reduce their energy consumption and carbon dioxide (CO2) emissions. However, achieving the goals set out by climate scientists and the United Nations is no easy task for any industry — let alone the semiconductor manufacturers. Using piezo-based valve technology in the design of nitrogen purge systems reaps many benefits — including reducing carbon emissions by up to 4 percent, as demonstrated in a large semiconductor fab.

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