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"How Fluoroelastomer (FKM) with Enhanced Plasma Performance Exceed Typical Fluoroelastomers in Semiconductor Applications"

Improved total cost of ownership for applications that don’t require an FFKM compound.

The quest for higher performance has steadily increased the complexity of semiconductor manufacturing. Corrosive, exotic, and highly reactive gases combined with new metallization chemistries have increasingly challenged subfab vacuum and abatement systems, requiring more advanced seals to help ensure uptime.

Greene Tweed’s Fusion® F07 was developed to address these key challenges for subfab sealing materials. Fusion® F07 is an enhanced Fluoroelastomer sealing material designed to deliver high performance at a lower cost of operation than existing premium sealing technologies. Its ability to withstand excursion temperatures up to 220°C (428°F), continuous service temperature of 180°C (256°F), and a broad range of harsh chemicals while reducing cost of operation compared with premium sealing materials makes F07 ideal for sealing in subfab applications. In this white paper, we focus on specific sealing elements that are frequently replaced in subfab equipment and the cost and performance benefits of F07 for these applications.

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