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"Next-Generation 3D Surface Measurement Technology"

Confidently measure any 3D surface regardless of material or surface shape

Surface measurement has always required compromise—choose between speed and accuracy, resolution and field of view, or invest in multiple specialized instruments. The VK-X4000 Series eliminates these tradeoffs by integrating three measurement principles into a single platform with full automation.

Capabilities include:

• Three integrated principles optimized for every application—from steep angles to sub-nanometer surface analysis
• Multi-point measurement that automatically scans and analyzes up to 3,000 locations across multiple parts
• New 300 mm motorized stage providing 9× greater measurement range for wafers and large samples
• ISO 25178 and ISO 21920 compliance with automatic roughness parameter analysis
• 28,800× magnification delivering SEM-quality imaging without vacuum requirements

View application examples and discover advanced capabilities like spectral film thickness measurement and automatic roughness parameter analysis. This comprehensive guide includes system configurations, optional accessories, and technical specifications to help you determine the optimal setup for your requirements.

Offered Free by: KEYENCE Corporation
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